Preparation chambers
Two UHV preparation chambers are available on the A-branch endstation
“PrepMain”
Base pressure | 1⋅10-10mbar |
Sample manipulation | 4-axis Prevac LHe open cycle manipulator |
Sputter gun | Yes |
Heating | Electron beam Direct current |
Cooling | LN2: 80K LHe: 40-50K |
Characterization | ScientaOmicron 3-grid SPECTRALEED Thickness monitor RGA Wobble stick for cleaving |
Deposition | 2 quick install deposition source ports CF 40 Additional CF40 ports |
Gas dosing | Leak valve |
Other | Possibility to attach vacuum suitcase |
“PrepSec”
Base pressure | 1⋅10-10mbar |
Sample manipulation | 4-axis Prevac LN2 manipulator |
Sputter gun | Yes |
Heating | Electron beam Direct current Resistive |
Cooling | LN2: 100K |
Characterization | ScientaOmicron 3-grid SPECTRALEED Thickness monitor RGA Wobble stick for cleaving |
Deposition | 2 quick install deposition source ports CF 40 Additional CF40 ports for user supplied evaporation sources |
Gas dosing | Leak valve |